Central Facilities

Microelectronics
Facility

Electron Microscope
Facility

Joint Engineering
Physics Instrument Group

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Microelectronics Facility

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Highlights

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The Microelectronics Central Facility provides the necessary microfabrication resources for research into modern microelectronic devices. It contains the varied pieces of equipment required for a complete fabrication sequence of such devices as transistors and lasers, including tools for lithography, etching, metal and dielectric deposition, and various thermal treatments. Run on a user fee basis, it provides the primary fabrication support for faculty in Engineering and Physics studying nanostructures and advanced devices, as well as technological services to colleagues in other departments at Brown (such as Biology and Medicine, or Chemistry), to local industry and to researchers at other academic institutions. In addition, the Facility supports graduate and undergraduate instruction, including an undergraduate Design of Semiconductor Devices experimental course that is entirely run on Microelectronics Facility equipment.

The Microelectronics Facility is operated as a cost-center and is administered by the Center for Advanced Materials to provide support for personnel, supplies, and routine maintenance of the equipment. The Facility is continuously renewed and upgraded through block and individual grants The current director of the facility is Prof. Alex Zaslavsky, Associate Director is Bill Patterson and the facility supports a full-time research engineer, Michael Jibitsky who provides instruction to new users and maintains equipment.

The CAMR Microelectronics Facility receives support from many CAMR block grants, such as:

  • The MRSEC/NSF under Award No. DMR-0079964;
  • MURI2000/AFOSR under Award No. F49620-00-1-0331;
  • Optoelectronics Center/DARPA under Award MDA972-00-1-0023;
  • Bio/Info/Micro-DARPA under Award MDA972-00-1-002.

We would appreciate your acknowledgement in your reports and publications.

For further information contact:

Alexander Zaslavsky
Associate Prof. of Engineering and Physics
Director Microelectronics Facility
Phone: (401) 863-1406
Box D, Brown University

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