Micro- and Nano-Fabrication
- Uniform self-assembled AAO nanopore arrays
- Uniform nanopost/nanotube arrays using bottom-up fabrication techniques (nanoposts/tubes made of carbon, Au, Si, polymer)
- Nano-probes and nano-sensors
- Anodization, pore-widening, electrodeposition, electroless deposition, e-beam evaporation
- Dry Etching: RIE, Ion Milling
- Wet Etching
- Lithography: e-beam, optical
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Xu, J.M. |
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Nanotubes grown on glass Mehrmanesh, L. |
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Xu, J.M. |
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Xu, J.M. |
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Oblique SEM view of periodic gold-nanodot arrays on glass substrate. Cloutier, S. |
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SEM of Matrix |
J. F. Waters, L. Riester, M. Jouzi, P. R. Guduru, and J. M. Xu "Buckling instabilities in multi-walled carbon nanotubes under uniaxial compression", APL, 85(10), 1787-1789, 2004.
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Large variation of sputtered AuPd particle size |
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Process flow illustrating the two step anodization process whereby the highly ordered pretexturing left behind after the 1st anodization leads to the formation of highly ordered nanochannels after the 2nd anodization |
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SEM cross-sectional image showing the thickness of the mesh-like formation of ZnO nanorods |
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In-situ TEM imaging of real-time VLS growth of Ge nanowires starting with a Au catalyst |
Chik, H (2004). Zinc Oxide Nanorods. PhD Thesis, Brown University, RI.
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Fabrication Process |