D. A. Grü̈tzmacher, Sedgwick, T. O., Northrop, G. A., Zaslavsky, A., and Powell, A. R., “Very narrow SiGe/Si quantum wells deposited by low-temperature atmospheric pressure chemical vapor deposition”, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 11, no. 3, p. 1083, 1993. DOI