Full Scale Mixed Lubrication Modeling Approach
Gagan Srivastava (CMU), C. Fred Higgs (Carnegie Mellon University)
Contact Mechanics
Tue 2:40 - 4:00
Barus-Holley 161
Many industrial and natural process operate in the boundary to mixed lubrication regime. In mixed lubrication, the applied load is being supported by both the solid-solid asperity contact, and the hydrodynamic pressure generated in the lubricant. A generalized mixed lubrication modeling framework is introduced. The fluid pressure is calculated by solving the Reynold's lubrication equation. The contact mechanics is being modeled by using a high-speed memory efficient technique. Using the contact stress distribution, material removal is calculated. Application in the field of semiconductor manufacturing process of chemical mechanical polishing, and in artificial hip joints is discussed.