Introduction

Lab Members

Publications

 

 

2010

Spontaneous Patterning of Surfaces by Low-Energy Ion Beams, E. Chason, W.L. Chan, Materials Science with Ion Beams in Book Series: Topics in Applied Physics   Volume: 116   Pages: 53-71 (2010)

Real-time SEM/FIB studies of Whisker Growth and Surface Modification, Nitin Jadhav, Eric Buchovecky, Eric Chason, Allan Bower. JOM, (2010) submitted.

Crack-like diffusion wedges and compressive stress evolution during thin film growth with inhomogeneous grain boundary diffusivity, Tanmay K. Bhandakkar, Eric Chason and Huajian Gao, IJAM (2009) submitted

Understanding the correlation between intermetallic growth, stress evolution and Sn whisker nucleation, N. Jadhav, E. Buchovecky, L. Reinbold,  K.S. Kumar, A. Bower and E. Chason, IEEE Trans on Pack. Manuf., (2009), submitted

Analytical model of transient compressive stress evolution during growth of high diffusivity thin films on substrates, Tanmay K. Bhandakkar, Huajian Gao and Eric Chason, Phil Mag. (2009) Submitted

Surface morphology evolution during sputter deposition of thin films: lattice Monte Carlo simulations, Luis A. Zepeda-Ruiz, George H. Gilmer, Christopher C. Walton, Alex V. Hamza, Eric Chason, J of Crystal Growth, (2009) in press.

Another mechanism of stress control in thin films: use of surfactant, Yi Yang and Hanchen Huang  S. K. Xiang, Eric Chason, Appl Phys Lett, (2009) submitted

2009

Finite element modeling of stress evolution in Sn films due to growth of Cu6Sn5 intermetallic compound, Eric J. Buchovecky, Nitin Jadhav, Allan F. Bower, and Eric Chason, Journal of Electronic Materials, 38, 2676 (2009) (Selected as editor’s choice)

Understanding stress in sputtered films with kinetic Monte Carlo simulations: effect of growth parameters and surface roughening instability, Luis A. Zepeda-Ruiz, Eric Chason, George Gilmer , Andy Detor, Andrea Hodge, Chris Walton, Morris Wang,  Hongwei Xu, Abbas Nikroo, Appl. Phys. Lett. 95, 151910 (2009).

Spontaneous Patterning of Surfaces by Low-Energy Ion Beams, E. Chason, W.L. Chan, Materials Science with Ion Beams in Book Series: Topics in Applied Physics   Volume: 116   Pages: 53-71 (2010)

Kinetic Monte Carlo simulations vs experimental properties of pattern formation during IBS, E. Chason and W. L. Chan,  J. Phys.: Condens. Matter 21, 224016 (2009)

Stress behavior of electroplated Sn films during thermal cycling, Jae Wook Shin, Eric Chason, J. Mater. Res. 24 (2009).

Stress-enhanced Pattern Formation on Surfaces during Low-Energy Ion-Bombardment, N.V. Medhekar, W. L. Chan, V.B. Shenoy and E. Chason,  J. Phys.: Condens. Matter 21, 224021 (2009).

Residual stress and microstructure of thick Be films, Andrew Detor, Andrea Hodge, Eric Chason, Morris Wang, Hongwei Xu, Mark Conyers, Abbas Nikroo, Alex Hamza, Acta Mat. 57, 2055 (2009).

Compressive stress generation in Sn thin films and the role of grain boundary diffusion, Jae Wook Shin, Eric Chason, Phys. Rev. Lett. 103, 056102 (2009)

Relation of Sn whisker formation to intermetallic growth: Results from a novel Sn-Cu "bimetal ledge specimen", L. Reinbold, N. Jadhav, E. Chason and K.S. Kumar, L. Reinbold, N. Jadhav, E. Chason and K.S. Kumar,  J of Materials Research 24, 3583 (2009)

 

2008

Irradiation stress in Cu induced by low energy ions: experiment and modeling, Wai Lun Chan , Eric Chason,  J. Vac. Sci. Tech. A26, 44 (2008)

DOE Panel Report on Basic Research Needs for Materials under Extreme Environments, E. Chason (one of multiple authors), DOE workshop on Materials Under Extreme Environments, in press.

Whisker formation in Sn and Pb-Sn coatings: role of intermetallic growth, stress evolution and plastic deformation processes, E. Chason, N. Jadhav, W.L. Chan, L. Reinbold and K.S. Kumar,  Appl. Phys. Lett. 92, 171901 (2008).

Plastic Deformation Processes in Cu/Sn Bimetallic Films, K.S. Kumar, L.Reinbold, E. Chason, J. Mater. Res. 28, 2916 (2008).

2007

A kinetic model of stress evolution during coalescence and growth of polycrystalline thin films,  Juan S. Tello, Allan F. Bower, Eric Chason and Brian Sheldon, Phys. Rev. Lett. 98,  216104 (2007).

Low Energy Ion Bombardment and Surface  Topography: Continuum Theories and Kinetic Monte Carlo Simulations in Ion Beam Science: Solved and Unsolved Problems, Eric Chason and Wai Lun Chan, Mat. Fys. Medd. Dan. Vid. Selsk, pp. 207 (2007)

Kinetic phase diagram for morphological evolution on Cu(001) surfaces during ion bombardment, Eric Chason and Wai Lun Chan, Nucl. Instr. Meth. B 256, 305 (2007).

surface stress induced in Cu foils during and after low energy ion bombardment, Wai Lun Chan, Eric Chason, C. Iamsumang, Nucl. Instr. Meth B257, 428 (2007)

Making Waves: Kinetic Processes Controlling Surface Evolution during Low Energy Ion Sputtering, Wai Lun Chan and Eric Chason, Applied Physics Reviews, J. Appl. Phys. 101, 121301 (2007)

Orientation of nano-grains in hard-disk media on ion-beam textured substrates, Y. Maekawa, K. Sato, E. Chason and T. Mizoguchi, IEEE Trans. Magn.  43, 2169 (2007).

Free Standing Thin Films for Large Area Single Crystal Substrates, Jae Wook Shin, Adam Standley, Eric Chason, Appl. Phys. Lett. 90, 261909 (2007).

Compositionally modulated ripples induced by sputtering of alloy surfaces, V. B. Shenoy, W. L. Chan, and E. Chason, Phys. Rev. Lett. 98, 256101 (2007)

Pb-Free and RoHS-Compliant Materials and Processes for Microelectronics, (E. Chason, ed.), MRS Symp. Proc. Vol. 993 E (electronic), 2007

Inexpensive large-area single crystal substrates produced by electrochemical thin film processes, A. Standley, J.W. Shin and E. Chason, MRS Bulletin vol. 32, Nov. 2007, p. 895.

2006

Kinetic mechanisms in ion-induced ripple formation on Cu(001) surfaces, E. Chason, W.L. Chan, Nucl. Instr. Meth. B 242, 232 (2006).

Morphology of ion sputtered Cu(001) surface: transition from unidirectional roughening to bidirectional roughening, Wai Lun Chan, Eric Chason,  Nucl. Instr. Meth. B242  228 (2006).

Kinetic Monte Carlo simulations of ion-induced ripple formation: Dependence on flux, temperature, and defect concentration in the linear regime,E. Chason, W.L. Chan, M.S. Bharathi, Phys. Rev. B 74, 224103 (2006)

Mobile dislocation density and strain relaxation rate evolution during InxGa1-xAs/GaAs heteroepitaxy , C. Lynch, E. Chason, R. Beresford, J. Appl. Phys. 100, 013525 (2006).

Degradation in Sn Films due to Whisker Formation,  L. Reinbold, E. Chason, N. Jadhav, V. Kelly, P. Holmes, J.W. Shin, W.L. Chan, K.S. Kumar, G. Barr, Mater. Res. Soc. Symp. Proc. Vol. 887,  197 (2006)

2005

Competition between tensile and compressive stress mechanisms during the Volmer-Weber growth of aluminum nitride films, B. W. Sheldon, A. Rajamani, A. Bhandari, E. Chason, S.K. Hong, and R. Beresford, J. Appl. Phys.98, 043509 (2005).

Enhanced strain relaxation rate of InGaAs by adatom-assisted dislocation kink nucleation,  Candace Lynch,  Eric Chason, Rod Beresford,   J. Vac. Sci. Technol. B. 23, 1166 (2005).

Whisker Formation in Sn Coatings on Cu, Eric Chason, Lucine Reinbold and Sharvan Kumar, MRS Symp Proc. 851, 239 (2005).

Temperature and Flux dependence of ion induced ripple: a way to study defect and relaxation kinetics during ion bombardment, Wai Lun Chan, Eric Chason, MRS Symp Proc. 849, 97 (2005).

In situ measurement of the kinetics of dislocation-mediated strain relaxation in InGaAs/GaAs Heteroepitaxy, C. Lynch, E. Chason, R. Beresford, D.C. Paine, K. Tetz, Appl. Phys. Lett., in preparation

Limits of strain relaxation in InGaAs/GaAs probed in Real-time by in situ wafer curvature measurement, C. Lynch, E. Chason, R. Beresford, L. B. Freund, K. Tetz, and K. W. Schwarz, J. Appl. Phys. 98, 073532 (2005)

Transient Topographies of Ion Patterned Si(111), Ari-David Brown, Wai Lun Chan, Eric Chason, Jonah Erlebacher, Phys. Rev. Lett. 95, 056101 (2005).

Sputter ripples and radiation-enhanced surface kinetics on Cu(001), W.L. Chan, E. Chason, Phys. Rev B. 72, 165418 (2005).

Kinetics Driven Nanopatterning at Surfaces, eds. E. Chason, H. Huang, G. Gilmer, E. Wang, Materials Research Society Symposium Vol 849, 2005.

2004

Influence of growth flux and surface Supersaturation  on InGaAs/GaAs Strain Relaxation,  C. Lynch, E. Chason, R. Beresford, S.K. Hong, App. Phys.  Lett., 84 , 1085 (2004).

kinetics of ion-induced rIpple formation On Cu(001) surfaces, Wai Lun Chan, Niravun Pavenayotin, Eric Chason, Phys. Rev. B69, 254413 (2004)

Real-time strain evolution during growth of Inx Al1-x As/GaAs metamorphic buffer layers, C. Lynch, R. Beresford, E. Chason, J. Vac. Sci. Technol.,   B 22, 1539 (2004).

Influence of Step-Edge Barriers on the  Morphological Relaxation of Nanoscale Ripples on Crystal Surfaces,  V. B. Shenoy, A. Ramasubramaniam, H. Ramanarayan, D. T. Tambe, W-L. Chan, and E. Chason,  Phys. Rev. Lett. 92, 256101 (2004)

Relaxation kinetics of nano-ripples on Cu(001) surface, W. L. Chan, A. Ramasubramaniam, V.B. Shenoy, E. Chason, Phys. Rev. B 70, 245403 (2004)

2003

kinetics of Dislocation-Mediated Strain Relaxation in InGaAs/GaAs Heteroepitaxy, R. Beresford, C. Lynch, and E. Chason, J. Crystal Growth 251, 106 (2003)

spontaneous formation of patterns on sputtered surfaces, (Invited contribution to Viewpoint Series on Driven Alloys), E. Chason, M. Aziz, Scripta Mater 49, 953 (2003).

Observation of ion-induced ripples in Cu(001), Wai Lun Chan, Niravun Pavenayotin, Eric Chason, MRS Symp. Proc vol. 777,  (2003)

Mechanics of Compressive Stress Evolution during Thin Film Growth, P.R.Guduru, E.Chason and L.B.Freund, J. Mech. Phys. Solids 51,  2127 (2003).

Intrinsic Compressive Stress in Polycrystalline Films with Negligible Grain Boundary Diffusion, B.W. Sheldon, A. Ditkowski, R. Beresford, E. Chason, J. Rankin, J. Appl. Phys.  94,  948 (2003).

monitoring stress in thin films during processing, E. Chason and B. Sheldon, Surface Engineering 19, (2003).

Book Review (Structure and Bonding in Crystalline Materials, G.S. Rohrer), E. Chason,  MRS Bulletin 28, 868, Nov. 2003.

2002

ORIGIN OF COMPRESSIVE RESIDUAL STRESS IN POLYCRYSTALLINE THIN FILMS, E. Chason, B.W. Sheldon, L.B. Freund,  J.A. Floro, S.J. Hearne, Phys. Rev. Lett. 88, 156103 (2002).

PHYSICAL ORIGINS OF INTRINSIC STRESSES IN VOLMER-WEBER THIN FILMS, (invited review), Jerrold A. Floro, Eric Chason, Robert C. Cammarata, David J. Srolovitz,  MRS Bulletin 27, 19 (2002).

A STUDY OF THE EFFECT OF PROCESS OXYGEN ON STRESS EVOLUTION IN DC-MAGNETRON DEPOSITED TIN-DOPED INDIUM OXIDE, H-Y. Yeom, N. Popovich, E. Chason and D. Paine, Thin Solid Films 411, 17 (2002)

DISLOCATION STRUCTURE AND RELAXATION KINETICS IN INGAAS/GAAS HETEROEPITAXY, C. L. Lynch, E. Chason, R. Beresford, E. B.  Chen, and D.C. Paine, J. Vac. Sci. Technol. B20, 1247 (2002).

Intrinsic Tensile Stress and Grain Boundary Formation during Volmer-Weber Growth,  A. Rajamani, B.W. Sheldon, E. Chason, A. Bower, Appl. Phys. Lett. 81, 1204 (2002).

Nonclassical smoothening of nanoscale surface corrugations – Reply, J. Erlebacher, M.J. Aziz, E. Chason, M.B. Sinclair, J.A. Floro, Phys. Rev. Lett. 88,  (2002).

A Structural Study of the Amorphous to Crystalline Transformation in In2O3 Thin Films, B.Yaglioglu, H.-Y. Yeom, E. Chason, D. C. Paine, Mat. Res. Symp. Proc., submitted (2002)

Current Issues in Heteroepitaxial Growth – Stress Relaxation and Self Assembly, eds. E.A. Stach, E. Chason, R. Hull, S.D. Bader, MRS Symp. Proc. 696, (Materials Research Society, Warrendale, PA, 2002)

STRESS EVOLUTION AND WHISKER FORMATION IN TIN COATINGS ON COPPER, L. Kabakian, E. Chason, S. Kumar, Proceedings of GOMACTech 2003 Conference.

2001

The Dynamic Competition Between Stress Generation and Relaxation Mechanisms During Coalescence of Volmer-Weber Thin Films, J. A. Floro, S. J. Hearne, J. A. Hunter, and P. Kotula, E. Chason, S. C. Seel and C. V. Thompson, J. Appl. Phys. 89, 4886 (2001).

Dynamics of Pattern Formation during Low Energy Ion Bombardment of Si(001), Eric Chason, Jonah Erlebacher, Michael J. Aziz, J.A. Floro and M.B. Sinclair, Nucl Instr. And Meth. B178, 55 (2001)

metastability of InGaAs/GaAs probed by in situ optical stress sensor, R. Beresford, K. Tetz, J. Yin, E. Chason, M. Ujue Gonzalez, J. Vac. Sci. Technol B19, 1572 (2001).

MODEL FOR STRESS GENERATED UPON CONTACT OF NEIGHBORING ISLANDS ON THE SURFACE OF A SUBSTRATE, L.B. Freund, E. Chason, J. Appl. Phys. 89, 4866 (2001).

2000

“X-ray reflectivity for studies of surface and interface structure”, E. Chason, in In Situ Characterization of Thin Film Growth Processes, A. Krauss and O. Auciello, eds., (John Wiley and Sons, New York, 2000) pp. 167-190.

“Curvature based techniques for real-time stress measurements during thin film growth”, J.A. Floro and E. Chason, in In Situ Characterization of Thin Film Growth Processes, A. Krauss and O. Auciello, eds., (John Wiley and Sons, New York, 2000) pp. 191-216.

REAL-TIME MEASUREMENTS OF STRESS RELAXATION IN InGaAs/GaAs, R. Beresford, J. Yin, K. Tetz, E. Chason, J. Vac. Sci. Technol. B18, 1431 (2000).

NOVEL SiGe COHERENT ISLAND COARSENING: OSTWALD RIPENING AND ELASTIC INTERACTIONS, J. A. Floro, M. Sinclair, E. Chason, L. B. Freund, R. D. Twesten, R. Q. Hwang, and G.A. Lucadomo, Phys. Rev. Lett. 84, 701 (2000) .

non-classical Smoothing of nanoscale Surface corrugations, J. Erlebacher, M.J. Aziz, E. Chason, M.B. Sinclair and J.A. Floro, Phys. Rev. Lett. 84, 5800 (2000).

NON-LINEAR AMPLITUDE EVOLUTION DURING SPONTANEOUS PATTERNING OF ION-BOMBARDED Si(001), J. Erlebacher, M.J. Aziz, E. Chason, M.B. Sinclair and J.A. Floro, J. Vac. Sci. Technol. A18, 115 (2000).

In situ measurements of stress relaxation during strained layer heteroepitaxy, E. Chason, J. Yin, K. Tetz, R. Beresford, L.B. Freund, M. Ujue Gonzalez, J.A. Floro, Materials Research Society Symp. Proc. Vol 583, 167 (2000).

Brittle-ductile relaxation kinetics of strained AlGaN/GaN heterostructures, S. Hearne, J. Han, S.R. Lee, J.A. Floro, D.M. Follstaedt, E. Chason,, I.S.T. Tsong, Appl. Phys. Lett. 76, 1534 (2000).

a Study of the crystallization of amorphous indium (tin) oxide, D.C. Paine, E. Chason, E. Chen, D. Sparacin, H.-Y. Yeom, Materials Research Society Symp. Proc. 623, (2000).

Fundamental mechanisms of low-energy beam-modified surface growth and processing, eds. S.C. Moss, E. Chason, B.H. Cooper, J.M.E. Harper, T. Diaz de la Rubia, R.M.V. Murty, Materials Research Society Symposium Proceedings Vol. 585, 2000

1999

GaN Stress Evolution during Metal-organic Chemical Vapor Deposition, S. Hearne, E. Chason, J. Han, J.A. Floro, J. Fiegel, J. Hunter, H. Amano and I. Tsong, Appl. Phys. Lett. 74, 356 (1999).

Sputter rippling kinetics of Si(001): pattern forming instabilities on the atomic scale, J. Erlebacher, M.J. Aziz, E. Chason, M.B. Sinclair and J.A. Floro, Phys. Rev. Lett. 82, 2330 (1999).

Self-organized growth of alloy superlattices, P. Venezuela, J. Tersoff, J.A. Floro, E. Chason, D.M. Follstaedt, F. Liu and M.G. Lagally, Nature 397, 678 (1999).

EVOLUTION OF COHERENT ISLANDS IN Si1-xGex/Si(001), J.A. Floro, E. Chason, L.B. Freund, M. Sinclair, R.D. Twesten, R.Q. Hwang, and G.A. Lucadomo, Phys. Rev. B 59, 1990 (1999).

Extensions of the stoney formula for substrate curvature to configurations with thin substrates and large deformations, L.B. Freund, J.A. Floro and E. Chason, Appl. Phys. Lett. 74, 1987 (1999).

REAL-TIME MONITORING OF STRUCTURE AND STRESS EVOLUTION OF BORON FILMS GROWN ON Si(001) BY ULTRAHIGH VACUUM CHEMICAL VAPOR DEPOSITION, D. Nesting, J. Kouvetakis, S. Hearne, E. Chason and I.S.T. Tsong, J. Vac. Sci. Technol A17, 891 (1999).

Monitoring and controlling of strain during MOCVD of AlGaN for UV Optoelectronics, J. Han, M.H. Crawford, R.J. Shul, S.J. Hearne, E. Chason, J.J. Fiegel, M. Banas, MRS Internet Journal of Nitride Semiconductor Research 4, U818 (1999).

1998

SPECTROSCOPIC LIGHT SCATTERING MEASUREMENTS FOR REAL TIME MEASUREMENTS OF THIN FILM AND SURFACE EVOLUTION, E. Chason, M.B. Sinclair, J.A. Floro, J.A. Hunter and R.Q. Hwang, Appl. Phys. Lett. 72, (1998).

A LASER-BASED THIN-FILM GROWTH MONITOR, C. Taylor, D. Barlett, E. Chason and J. Floro, The Industrial Physicist 4, 25 (1998).

SiGe ISLAND SHAPE TRANSITIONS INDUCED BY ELASTIC REPULSION, J.A. Floro, G.A. Lucadomo, E. Chason, L.B. Freund, M. Sinclair, R.D. Twesten, R.Q. Hwang, Phys. Rev. Lett. 80, 4717 (1998).

DYNAMIC SELF-ORGANIZATION OF STRAINED ISLANDS DURING SiGe EPITAXIAL GROWTH, J.A. Floro, E. Chason, M. Sinclair, G.A. Lucadomo, L.B. Freund, Appl. Phys. Lett. 73, 951 (1998).

Stress and defect control in GaN using low-temperature interlayers, H. Amano, M. Iwaya, M. Katsuragawa, I. Akasaki, J. Han, S. Hearne, J.A. Floro, E. Chason and J. Fiegel, Japanese Journal of Appl. Phys. 37,  L1540 (1998).

1997

Monte Carlo Simulations of Ion-Enhanced Island Coarsening, E. Chason and B.K. Kellerman, Nucl. Instr. And Meth. B127/128, 225 (1997).

EVOLUTION OF SURFACE ROUGHNESS DURING CVD GROWTH, E. Chason, T.M. Mayer, D.P. Adams, H. Huang, T.Diaz de la Rubia, G. Gilmer,  B. K. Kellerman , Mater. Res. Symp. Proc. 440, 157 (1997).

Ion Beams in Silicon Processing and Characterization, E. Chason, , S.T. Picraux, J.M. Poate, J.O. Borland, M.I. Current, T. Diaz de la Rubia, D.J. Eaglesham, O.W. Holland, M.E. Law, C.W. Magee, J.W. Mayer, J. Melngailis and A.F. Tasch, J. Appl. Phys. Rev. 81, 6513 (1997).

Thin Film and Surface Characterization using Specular X-ray Reflectivity,  E. Chason and T.M. Mayer, CRC Critical Reviews in Materials and Solid State Science 22, 1 (1997).

Measurements of Stress Evolution during Thin Film Growth, E. Chason and J.A. Floro, Mater. Res. Symp. Proc. 428, 499 (1996).

Decay of Isolated Features Driven by the Gibbs-Thomson Effect in Analytical Model and Simulation, J.G. McLean, B. Krishnamachari, D.R. Peale, E. Chason, J..P. Sethna and B.H. Cooper, Phys. Rev. B 55, 1811 (1997).

In Situ X-ray Reflectivity Investigation of Growth and Surface Morphology during Fe Chemical Vapor Deposition on Si(001),  B.K. Kellerman, E. Chason, T.M. Mayer, D.P. Adams and J.M. White, Surf. Sci. 375, 331 (1997).

BIAXIAL MODULI OF COHERENT Si1-xGex FILMS ON Si(001), J. A. Floro, E. Chason, S. R. Lee, and G. A. Petersen, Applied Physics Letters 71, 1694 (1997).

REAL-TIME STRESS EVOLUTION DURING SixGe1-x HETEROEPITAXY: DISLOCATIONS, ISLANDING, AND SEGREGATION, J. A. Floro, E. Chason, S. R. Lee, R. D. Twesten, R. Q. Hwang, and L. B. Freund.  Journal of Electronic Materials 24, 725 (1997).

SiGe COHERENT ISLANDING AND STRESS RELAXATION IN THE HIGH MOBILITY REGIME, J. A. Floro, E. Chason, R. D. Twesten, R. Q. Hwang, and L. B. Freund, Physical Review Letters 79, 3946 (1997).

Structure and Evolution of Surfaces, Mater. Res. Soc. Symp. Proc. Vol. 440, R.C. Cammarata, E. Chason. T. Einstein and E.D. Williams, eds., 1997.

Thin Films - Structure and Morphology, Mater. Res. Soc. Symp. Proc. Vol. 441, S.C. Moss, D. Ila,  R.C. Cammarata, E. Chason. T. Einstein and E.D. Williams, eds., 1997.

1996

 ENERGY DISPERSIVE X-RAY REFLECTIVITY CHARACTERIZATION OF SEMICONDUCTOR HETEROSTRUCTURES AND INTERFACES, E. Chason, T.M. Mayer, Z. Matutinovic Krstelj and J.C. Sturm, in Semiconductor Characterization, Present Status and Future Needs, W.M. Bullis, D.G. Seiler and A.C. Diebold, eds., (American Institute of Physics, Woodbury, NY, 1996) p. 512.

THE ROLE OF TRANSIENT ION-INDUCED DEFECTS IN ION BEAM-ASSISTED GROWTH, B.K. Kellerman, E. Chason, J.A. Floro, E. Chason, S.T. Picraux and J.M. White, Appl. Phys. Lett. 67, 1703 (1995).

SMOOTHING DURING ION-ASSISTED GROWTH BY TRANSIENT ION BEAM-INDUCED DEFECTS, B.K. Kellerman, E. Chason, J.A. Floro, E. Chason, S.T. Picraux and J.M. White, Mat. Res. Soc. Symp. Proc. 388, 349 (1995).

SPUTTER ROUGHENING INSTABILITY ON THE Ge (001) SURFACE: ENERGY AND FLUX DEPENDENCE, E. Chason, B.K. Kellerman and T.M. Mayer, Mat. Res. Soc. Symp. Proc. 396, 143 (1996).

REAL-TIME MEASUREMENT OF EPILAYER STRAIN USING A SIMPLIFIED WAFER CURVATURE TECHNIQUE, J.A. Floro, E. Chason and S.R. Lee, Mat. Res. Soc. Symp. Proc. 396, 859 (1996).

ISLAND STRUCTURE EVOLUTION DURING CHEMICAL VAPOR DEPOSITION, D.P. Adams, T.M. Mayer, L.L. Tedder, B.S. Swartzentruber, E. Chason, Surf. Sci. 371, 445 (1997).

Ge Segregation Profiles Determined by Real-time Surface Stress Measurements during SiGe Molecular Beam Epitaxy, J.A. Floro and E. Chason, Appl. Phys. Lett. 69, 3830 (1996).

Energetic Ions in Semiconductor Processing: Summary of a DOE Panel Study, S.T. Picraux, E. Chason, J.M. Poate, J.O. Borland, M.I. Current, T. Diaz de la Rubia, D.J. Eaglesham, O.W. Holland, M.E. Law, C.W. Magee, J.W. Mayer, J. Melngailis and A.F. Tasch, Mater. Res. Symp. Proc. 396, 859 (1996)
1995

SURFACE DEFECT PRODUCTION ON Ge (001) DURING LOW ENERGY ION BOMBARDMENT, J.A. Floro, B.K. Kellerman, E. Chason, S.T. Picraux, D.K. Brice and K.M. Horn, J. Appl. Phys. 77, 235 (1995).

GROWTH PRESSURE EFFECTS ON Si/Si1-XGeX CHEMICAL VAPOR DEPOSITION, Z. Matutinovic-Krstelj, E. Chason and J. C. Sturm, J. of Electronic Materials 24, 725 (1995).

ROUGHENING INSTABILITY AND ENHANCED SURFACE TRANSPORT ON SPUTTERED SURFACES, E. Chason, Bulletin of the American Physical Society 39 (1994) 974.

NON-DESTRUCTIVE MEASUREMENT OF POROUS SILICON THICKNESS USING X-RAY REFLECTIVITY, T.R. Guilinger, M.J. Kelly, E.Chason, T.J. Headley and A.J. Howard, J. of the Electrochemical Society 142, 1634 (1995).

THE ROLE OF CURVED STEP EDGES IN THE BEHAVIOR OF NANOSCALE SYSTEMS, J.G. McLean, D.R. Peale, R. Phillips, E. Chason and B.H. Cooper,  Bulletin of the American Physical Society 39 (1994) 740.

NON-DESTRUCTIVE CHARACTERIZATION OF POROUS SILICON USING X-RAY REFLECTIVITY, E. Chason, T.R. Guilinger, M.J. Kelly, T.J. Headley and A.J. Howard, Mat. Res. Soc. Symp. Proc. 358, 321 (1995).

DEFECT PRODUCTION AND RECOMBINATION DURING LOW ENERGY ION PROCESSING, B.K. Kellerman, J.A. Floro, E. Chason, D.K. Brice, S.T. Picraux and J.M. White, J. Vac. Sci. Technol. A13 , 972 (1995).

INITIAL STAGES OF Fe CHEMICAL VAPOR DEPOSITION ONTO Si(100), D.P. Adams, T.M. Mayer, B.S. Swartzentruber and E. Chason, Phys. Rev. Lett. 74, 5088 (1995).

1994

ROUGHENING INSTABILITY AND ION-INDUCED VISCOUS RELAXATION OF SiO2 SURFACES, T.M. Mayer, E. Chason and A.J. Howard, J. Appl. Phys. 76, 1633 (1994).

IN SITU X-RAY REFLECTIVITY MEASUREMENTS OF THIN FILM STRUCTURAL EVOLUTION, E. Chason and M.K. Chason, J. Vac. Sci. Technol. A12,, 1565 (1994).

ROUGHENING INSTABILITY AND EVOLUTION OF Ge(001) SURFACE DURING ION SPUTTERING, E. Chason, T.M. Mayer, B.K. Kellerman, D.T. McIlroy and A.J. Howard, Phys. Rev. Lett. 72, 3040 (1994).

INTRA-CASCADE SURFACE RECOMBINATION OF POINT DEFECTS DURING ION BOMBARDMENT OF Ge (001), J.A. Floro, B.K. Kellerman, E. Chason, S.T. Picraux, D.K. Brice and K.M. Horn, Mat. Res. Soc. Symp. Proc.

OXYGEN ROUGHENING OF Ge (001) SURFACES, K.M. Horn, J.Y. Tsao, E. Chason and S.T. Picraux, Surface Science 320, 174 (1994).

KINETICS OF SURFACE ROUGHENING AND SMOOTHING DURING ION SPUTTERING, E. Chason, T.M. Mayer, B.K. Kellerman, D.T. McIlroy and A.J. Howard, Mat. Res. Soc. Symp. Proc. 317 , 91 (1994).

1993

X Ray Reflectivity Measurements of Vacuum Deposited Thin Films, M. Chason and E. Chason, Proceedings of Motorola 1993 Winter Advanced Manufacturing Technologies Symposium, Phoenix, AZ, February 23-24, 1993.

on Bombardment of Sio2/Si and Si Measured by In Situ X-Ray Reflectivity, E. Chason, T. M. Mayer, D. McIlroy, C. M. Matzke, Nucl. Instr. Meth. B80/81, 742 (1993).

Mass Flow and Stability of Nanoscale Features on AU(111).  B.H. Cooper, D.R. Peale, J.G. McLean, R. Phillips and E. Chason, Mat. Res. Soc. Symp. Proc. 280, 37 (1993).

EVOLUTION OF SURFACE AND THIN FILM MICROSCTUCTURE, H.A. Atwater, E. Chason, M. Grabow and M. Lagally, eds., Mat. Res. Soc. Symp. Proc. 280, (Pittsburgh, PA, 1993).

INTERFACE ROUGHNESS: WHAT IS IT AND HOW IS IT MEASURED?  Eric Chason, C.M. Falco, A. Ourmazd, E.F. Schubert, J.M. Slaughter and R.S. Williams, Mat. Res. Soc. Symp. Proc. 280, 203 (1993).

1992
.IN SITU ENERGY DISPERSIVE X-RAY REFLECTIVITY MEASUREMENTS OF H ION BOMBARDMENT ON SiO2/Si AND Si, E. Chason, T. M. Mayer, A. Payne and D. Wu, Appl. Phys. Lett. 60, 2353 (1992).

SIMULATIONS OF LOW-ENERGY ION BOMBARDMENT AND EPITAXIAL GROWTH, E. Chason, P. J. Bedrossian, J. Y. Tsao, B. W. Dodson and S. T. Picraux, Mat. Res. Soc. Symp. Proc. 236, 281 (1992).

Ge SURFACE DISPLACEMENT DUE TO LOW ENERGY PARTICLES, S. T. Picraux, K. M. Horn, E. Chason, J. Y. Tsao, P. Bedrossian, T. Klitsner and D. K. Brice, Mat. Res. Soc. Symp. Proc. 236, 235 (1992).

LOW ENERGY ION BOMBARDMENT INDUCED ROUGHENING AND SMOOTHING OF SiO2 SURFACE, E. Chason, T. M. Mayer, Appl. Phys. Lett. 62, 363 (1993).

ION-ASSISTED SURFACE PROCESSING OF ELECTRONIC MATERIALS, S. T. Picraux, E. Chason (1112), and T. M. Mayer, MRS Bulletin Vol. XVII, 52 (June, 1992).

1991

EFFECT OF PRESSURE ON CRYSTALLIZATION KINETICS OF CORDIERITE GLASS, E. Chason and M. J. Aziz, J. Non-Crystalline Solids 130, 204 (1991).

HYDROGEN ION BEAM SMOOTHENING OF Ge(001), K. M. Horn, J. Y. Tsao, E. Chason, D. K. Brice and S. T. Picraux, J. Appl. Phys. 69, 243 (1991).

EFFECT OF STEP EDGE TRANSITION RATES AND ANISOTROPY IN SIMULATIONS OF EPITAXIAL GROWTH, E. Chason and B. W. Dodson, J. Vac. Sci. Technol. A9, 1545 (1991).

X-RAY REFLECTIVITY MEASUREMENTS OF SURFACE ROUGHNESS USING ENERGY DISPERSIVE DETECTION, E. Chason and D. Warwick, Mat. Res. Soc. Symp. Proc. 208, 351 (1991).

LAYER-BY-LAYER SPUTTERING AND EPITAXY OF Si(100), P. Bedrossian, J. E. Houston, J. Y. Tsao, E. Chason and S. T. Picraux, Phys. Rev. Lett. 67, 124 (1991).

SIMULATIONS OF LAYER-BY-LAYER SPUTTERING DURING EPITAXY, E. Chason, P. Bedrossian, J. E. Houston, J. Y. Tsao, B. W. Dodson and S. T. Picraux, Appl. Phys. Lett. 59, 3533 (1991).

1990

NEAR-THRESHOLD ENERGY DEPENDENCE OF Xe-INDUCED DISPLACEMENTS ON Ge(001) S. T. Picraux, D. K. Brice, K. M. Horn, J. Y. Tsao and E. Chason, Nucl. Instr. & Meth B 48, 414 (1990).

                                                                                                                                                                                                                                  
SURFACE ROUGHENING OF Ge(001) DURING 200 eV Xe ION BOMBARDMENT AND Ge MOLECULAR BEAM EPITAXY, E. Chason, J. Y. Tsao, K. M. Horn, S. T. Picraux and H. A. Atwater, J. Vac. Sci. Technol. A8, 2507 (1990).

ADATOMS, STRINGS AND EPITAXY ON SINGULAR SURFACES, E. Chason and J. Y. Tsao,  Surf. Sci. 234, 361 (1990).

                                                                                                                                                                                                                                  
ION-BEAM ENHANCED EPITAXIAL GROWTH OF Ge(001), E. Chason, P. Bedrossian, K. M. Horn, J. Y. Tsao and S. T. Picraux, Appl. Phys. Lett. 57, 1793 (1990).

1989

LOW ENERGY ION BEAMS, MOLECULAR BEAM EPITAXY AND SURFACE MORPHOLOGY, J. Y. Tsao, E. Chason, K. M. Horn, D. K. Brice and S. T. Picraux, Nucl. Instr. & Meth. B 39, 72 (1989).

DYNAMICS OF GROWTH ROUGHENING AND SMOOTHENING ON Ge(001), E. Chason, J. Y. Tsao, K. M. Horn and S. T. Picraux,  J. Vac. Sci. Technol. B7, 332 (1989).

HYDROGEN ION BEAM SMOOTHENING OF OXYGEN-ROUGHENED Ge(001) SURFACES, K. M. Horn, E. Chason, J. Y. Tsao, and S. T. Picraux, Mat. Res. Soc. Symp. Proc. 131, 549 (1989).

ARGON ION BOMBARDMENT DURING MOLECULAR BEAM EPITAXY OF Ge(001), E. Chason,  K. M. Horn, J. Y. Tsao and S. T. Picraux, Mat. Res. Soc. Symp. Proc. 128, 35 (1989).

DIMER STRINGS, ANISOTROPIC GROWTH, AND PERSISTENT LAYER-BY-LAYER EPITAXY, J. Y. Tsao, E. Chason, U. Koehler and R. Hamer, Phys. Rev. B 40, 11 951 (1989).

1984-1988

MEASUREMENTS OF STRUCTURAL RELAXATION IN AMORPHOUS Pd82Si18: X-RAY DIFFRACTION AND ELECTRICAL RESISTIVITY, E. Chason, K.F. Kelton, P.S. Pershan, L.B. Sorensen, F. Spaepen and A.H. Weiss, J. of Non-Cryst. Solids, Proc. of the 5th Int'l Conf. on Rapidly Quenched Metals, 1984.

STRUCTURAL RELAXATION OF AMORPHOUS Pd82Si: X-RAY MEASUREMENTS, ELECTRICAL RESISTIVITY MEASUREMENTS AND A COMPARISON USING THE ZIMAN THEORY, E. Chason, A.L. Greer, K.F. Kelton, P.S. Pershan, L.B. Sorensen, F. Spaepen and A.H. Weiss, Phys. Rev. B 32, 3399 (1985).

AMORPHOUS Cu-Zr AND Fe-Ti COMPOSITIONALLY MODULATED FILMS PRODUCED BY SPUTTERING FROM ELEMENTAL TARGETS, E. Chason, T. Mizoguchi, H. Kondo, R.C. Cammarata, F. Spaepen, B. Window, R.K. Day, and J. Dunlop, Mat. Res. Soc. Symp. Proc. 58, (1986), p. 69.

STRUCTURAL RELAXATION AND INTERDIFFUSION IN AMORPHOUS Fe-Ti COMPOSITIONALLY MODULATED FILMS, E. Chason, T. Mizoguchi,  Mat. Res. Soc. Symp. Proc. 80, (1987), p. 61.

VOLUME-DEPENDENT DIFFUSION AND DENSIFICATION IN AMORPHOUS COMPOSITIONALLY MODULATED Fe-Ti FILMS, E. Chason, T. Mizoguchi,  Proceedings of the Sixth International Conference on Liquid and Amorphous Metals, (R. Oldenbourg Verlag, Munchen, 1986), p. 397

PRESSURE INDUCED STRUCTURAL CHANGES IN BORON OXIDE GLASS, E. Chason and F. Spaepen, J. Appl. Phys. 64, 4435 (1988).

X-RAY STUDY OF STRUCTURAL CHANGES IN GLASSY Pd82Si18 AND B2O3, E. Chason, PhD. Thesis, Harvard University, 1985.