NIOSH Pocket Guide to Chemical Hazards

Methyl silicate CAS 681-84-5
(CH3O)4Si RTECS VV9800000
Synonyms & Trade Names
Methyl orthosilicate, Tetramethoxysilane, Tetramethyl ester of silicic acid, Tetramethyl silicate
DOT ID & Guide
2606 155
NIOSH REL: TWA 1 ppm (6 mg/m3)
OSHA PEL†: none
IDLH N.D. Conversion 1 ppm = 6.23 mg/m3
Physical Description
Clear, colorless liquid. [Note: A solid below 28°F.]
MW: 152.3
BP: 250°F
FRZ: 28°F
Sol: Soluble
VP(77°F): 12 mmHg
IP: ?

Sp.Gr: 1.02
Fl.P: 205°F
UEL: ?
LEL: ?

Class IIIB Combustible Liquid: Fl.P. at or above 200°F.
Incompatibilities & Reactivities
Oxidizers; hexafluorides of rhenium, molybdenum & tungsten
Measurement Methods
None available
Personal Protection & Sanitation
Skin: Prevent skin contact
Eyes: Prevent eye contact
Wash skin: Daily
Remove: When wet or contaminated
Change: No recommendation
Provide: Eyewash
First Aid (See procedures)
Eye: Irrigate immediately
Skin: Soap wash
Breathing: Respiratory support
Swallow: Medical attention immediately
Respirator Recommendations To be added later
Exposure Routes inhalation, ingestion, skin and/or eye contact
Symptoms Irritation eyes, corneal damage (following even short-term exposure to the vapor); lung, kidney injury; pulmonary edema
Target Organs Eyes, respiratory system, kidneys